Title:
【発明の名称】半導体装置の特性評価方法
Document Type and Number:
Japanese Patent JP2856801
Kind Code:
B2
Inventors:
SHIGYO NAOYUKI
FUKUDA SANAE
FUKUDA SANAE
Application Number:
JP32843689A
Publication Date:
February 10, 1999
Filing Date:
December 20, 1989
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G01N27/00; G06G7/00; H01L29/00; (IPC1-7): H01L29/00
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)