【発明の名称】可動ステージ装置 - Sumitomo Heavy Industries Ltd.

Title:

【発明の名称】可動ステージ装置

Document Type and Number:

Japanese Patent JP2706184

Kind Code:

B2

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Inventors:

Yamazaki Kazunori
Fumiaki Sato
Yoshiyuki Tomita

Application Number:

JP11608191A

Publication Date:

January 28, 1998

Filing Date:

May 21, 1991

Export Citation:

Assignee:

Sumitomo Heavy Industries Ltd.

International Classes:

F16C32/04; F16C29/00; F16C32/06; H01L21/66; (IPC1-7): F16C29/00; F16C32/04; F16C32/06

Domestic Patent References:

JP5388440A

Attorney, Agent or Firm:

Keishiro Takahashi

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