Title:
【発明の名称】光導波路デバイス
Document Type and Number:
Japanese Patent JPH05333221
Kind Code:
A
Abstract:
PURPOSE:To miniaturize the optical waveguide device by providing an org. high-polymer parallel waveguide via a thin overclad layer of a quartz system in the upper part of a quartz system parallel optical waveguide. CONSTITUTION:This optical waveguide device is constituted by having the quartz system parallel optical waveguide 21-1 formed on a silicon substrate 5, the desired thin overclad 6-2 of the quartz system formed in the upper part of the quartz system parallel optical waveguide 21-1 and the org. high-polymer parallel waveguide 35-2 formed in the upper part of the overclad layer 6-2. This org. high-polymer parallel waveguide 35-2 is provided by irradiating the layer with UV rays through a photomask to cause selective photopolymn. The film thickness of the overclad layer 6-2 of the lower layer of the org. high- polymer parallel waveguide 35-2 does not change at the time of providing this waveguide. Namely, the spacing between the org. high-polymer parallel waveguide 35-2 and the quartz system parallel optical waveguide 21-1 is reduced as desired and, therefore, the length of the coupling part is shortened.
Inventors:
KUNIKANE TATSURO
HAKOGI HIRONAO
HAKOGI HIRONAO
Application Number:
JP14082892A
Publication Date:
December 17, 1993
Filing Date:
June 02, 1992
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G02B6/122; G02B6/12; G02F1/313; (IPC1-7): G02B6/12; G02F1/313
Attorney, Agent or Firm:
Teiichi