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Title:
APPARATUS FOR X-RAY TOPOGRAPH
Document Type and Number:
Japanese Patent JPS593343
Kind Code:
A
Abstract:

PURPOSE: To take exactly a topograph for many hours, by bisecting a photographing film, measuring the intensity of X rays passing the slit, and correcting the rotation of a sliding mechanism in which the face of a sample crystal and the film interlock, based on the measured intensity.

CONSTITUTION: X rays emitted by an X ray source 1 are converted by the first crystal 2 into a diffracted parallel beam 3 of X rays, and are made incident to the second crystal 4. The diffracted beam 5 leaving the second crystal 4 is photographed on a bisected film 7 and, at the same time, is measured by a measuring instrument 9 which is located behind the slit 8. A measuring table 11 on which the second crystal 4, the film 7 and the measuring instrument 9 are fixedly arranged, is rotated by a follow-up mechanism 10, so that the maximum intensity of the diffracted beam 5 is found out by the measuring instrument 9. By such a construction, warpage of the crystalline plate due to change in temperature is corrected, and an exact photographing is achieved for many hours.


Inventors:
HIRAI IESADA
FUKUDA TETSUO
AMANO KAZUNARI
Application Number:
JP11282382A
Publication Date:
January 10, 1984
Filing Date:
June 30, 1982
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01N23/205; G01N23/20; H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Koshiro Matsuoka



 
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