【発明の名称】プラズマガウジング装置

Title:

【発明の名称】プラズマガウジング装置

Document Type and Number:

Japanese Patent JP2839760

Kind Code:

B2

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Inventors:

HOSHINO TADASHI
FUJAMA HIROHISA
SONODA HIROFUMI
INAMURA AKIO

Application Number:

JP19530791A

Publication Date:

December 16, 1998

Filing Date:

August 05, 1991

Export Citation:

Assignee:

NITSUTETSU YOSETSU KOGYO KK

International Classes:

B23K10/00; (IPC1-7): B23K10/00; B23K10/00

Domestic Patent References:

Attorney, Agent or Firm:

Nobuoki Sugi

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