【発明の名称】プラズマ処理装置

Title:

【発明の名称】プラズマ処理装置

Document Type and Number:

Japanese Patent JP2633849

Kind Code:

B2

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Inventors:

TAKEUCHI NAOHIKO
OOTSUBO TOORU
YAMAGUCHI YASUHIRO

Application Number:

JP6883887A

Publication Date:

July 23, 1997

Filing Date:

March 25, 1987

Export Citation:

Assignee:

HITACHI SEISAKUSHO KK

International Classes:

H01L21/302; H01L21/205; H01L21/3065; H05H1/46; (IPC1-7): H01L21/3065

Domestic Patent References:

JP6241838A
JP6258631A

Attorney, Agent or Firm:

Katsuo Ogawa (1 person outside)

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