Title:
【発明の名称】プラズマ処理方法
Document Type and Number:
Japanese Patent JP2619395
Kind Code:
B2
Inventors:
Yutaka Omoto
Makoto Nawata
Yutaka Kakehi
Makoto Nawata
Yutaka Kakehi
Application Number:
JP17096687A
Publication Date:
June 11, 1997
Filing Date:
July 10, 1987
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP5853833A | ||||
| JP60103620A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)