Title:
【発明の名称】基板用プローバ
Document Type and Number:
Japanese Patent JP2853045
Kind Code:
B2
Inventors:
HIRAI YUKIHIRO
Application Number:
JP11478089A
Publication Date:
February 03, 1999
Filing Date:
May 08, 1989
Export Citation:
Assignee:
NIPPON MAIKURONIKUSU KK
International Classes:
G01R1/073; H05K3/00; (IPC1-7): G01R1/073
Domestic Patent References:
| JP63206671A | ||||
| JP63252437A | ||||
| JP6491073A |
Attorney, Agent or Firm:
Toshiyuki Suzuki (1 person outside)