PURPOSE: To obtain a voltage a nonlinear element, having uniform film thickness and quality, which can be applied to the electronic component and devices such as an IC circuit, a display panel and the like.
CONSTITUTION: The title voltage nonlinear element is formed by successively laminating a lower electrode film 2, a voltage dependent nonlinear film 3 and an upper electrode film 4 on an insulated substrate 1. A metal oxide is formed into a metal oxide by firing the mixture metal organic material of Zn and metal organic material consisting at least of a kind selected from Bi, Mn, Co, Cr and Sb. Accordingly, as a constituent film is formed by a film-forming method in which the metal organic material is thermally decomposed, a thin type voltage nonlinear element, which is composed of the so-called thin film layer, can be obtained.
YAMAGUCHI YOSHINORI
HAYASHI KAZUHIRO
NIITSU TAKEHIRO
