Title:
【発明の名称】基板支持装置
Document Type and Number:
Japanese Patent JP3184510
Kind Code:
B2
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Inventors:
Shinichi Hara
Shunichi Uzawa
Shunichi Uzawa
Application Number:
JP18823389A
Publication Date:
July 09, 2001
Filing Date:
July 19, 1989
Export Citation:
Assignee:
Canon Inc.
International Classes:
H01L21/30; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP60194536A | ||||
| JP6224626A | ||||
| JP235709A | ||||
| JP6173327A | ||||
| JP61286629A |