Title:
【発明の名称】表面検査装置
Document Type and Number:
Japanese Patent JP3002325
Kind Code:
B2
Inventors:
Seikichi Nishimura
Midwest
Kenji Aizawa
Midwest
Kenji Aizawa
Application Number:
JP10781092A
Publication Date:
January 24, 2000
Filing Date:
April 27, 1992
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B11/30; G01N21/88; G01N21/89; G01N21/892; G06T1/00; G06T7/00; (IPC1-7): G01N21/88; G01B11/30; G01N21/89; G06T7/00
Domestic Patent References:
| JP4142412A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)