PURPOSE: To stabilize electrical, optical and photoconductive characteristics at all times by incorporating a material which governs conductivity into the 1st layer on a base side and having a layer region distributed nonuniformly toward the base side and incorporating nitrogen.
CONSTITUTION: The 1st layer 102 constituted of an amorphous material contg. Si and Ge and exhibiting photoconductivity is provided on a base 101. A material which governs conductivity such as the atoms belonging to the group III of periodic table, for example, B and Ga or atoms belonging to the group V of periodic table, for example, P, As, etc. are incorporated into the layer 102. The layer 102 are provided a layer region in which conductivity governing components are nonuniformly distributed toward the base side. The 2nd layer 103 constituted of an amorphous material contg. Si and C is provided on the layer 102.
OONUKI YUKIHIKO
OONO SHIGERU
