Title:
【発明の名称】感熱式流量センサ
Document Type and Number:
Japanese Patent JP2690066
Kind Code:
B2
Abstract:
PURPOSE:To prevent a decrease in the measured fluid quantity due to the low responsiveness of a thermally sensitive resistor and to prevent binary characteristic of a sensor by making the ratio of the length to the width or the diameter of a portion of a thermally sensitive resistor which comes into contact with a measured fluid more than a specified value. CONSTITUTION:A thermally sensitive resistor 3 comprises a temperature dependency resisting film 32 provided on the surface of an insulating base material 31, and one end thereof is supported vertically to the flowing direction of a fluid by a supporting member 5. The thermally sensitive resistor 3 is divided into a heat generating portion 35 with a length l1, a non-heat generating portion 36 with a length l2 and a support portion 37 with a length l3, which is supported by the supporting member in order from the forward end side. In order to increase the responsiveness of the thermally sensitive resistor 3 to the flow change. l1+l2 is enlarged or the width (w) of the thermally sensitive resistor 3 is reduced. The responsiveness of the thermally sensitive resistor to the flow change is increased by making the ratio of the length to the width or the diameter or a portion of the resistor, which comes into contact with a measured fluid more than 4, so that even if the measured fluid quantity is pulsated, the resistor can satisfactorily respond without binary. Thus, an excellent thermo- sensitive flow sensor can be obtained.
Inventors:
Yasuo Tada
Tomoya Yamakawa
Koji Tanimoto
Bessho Mikio
Tomoya Yamakawa
Koji Tanimoto
Bessho Mikio
Application Number:
JP40586690A
Publication Date:
December 10, 1997
Filing Date:
December 25, 1990
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01F1/68; F02B77/08; G01F1/692; G01P5/12; (IPC1-7): G01F1/68
Domestic Patent References:
| JP6060521A | ||||
| JP1216214A | ||||
| JP63134920A | ||||
| JP60135618U |
Attorney, Agent or Firm:
Miyazono Junichi