PURPOSE: To improve the reproduction output characteristics and adhesive strength by moving a substrate so that the incident angle of a flow of vapor of a magnetic metallic material is continuously changed from a large incident angle to a small incident angle and by introducing an oxidizing gas into the small incident angle part.
CONSTITUTION: A flow of vapor of a ferromagnetic body is diagonally vacuum- deposited on a support 2 transferred along a cylindrical cooling can 1 in the direction of an arrow 3 from an evaporating source 4 through a mask 5 so that the incident angle is continuously changed from a large incident angle θmax to a small incident angle θmin, and a gas introducing pipe 6 is installed at the small incident angle part to introduce an oxidizing gas such as gaseous oxygen.
SHIRAHATA RIYUUJI
KITAMOTO TATSUJI
| JPS5832234A | 1983-02-25 | |||
| JPS5837843A | 1983-03-05 |