Title:
【発明の名称】配線形成方法およびその装置
Document Type and Number:
Japanese Patent JP2533523
Kind Code:
B2
Inventors:
MIZUKOSHI KATSURO
PPONGO MIKIO
SANO HIDEZO
AZUMA JUNZO
PPONGO MIKIO
SANO HIDEZO
AZUMA JUNZO
Application Number:
JP6886087A
Publication Date:
September 11, 1996
Filing Date:
March 25, 1987
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/3205; H01L21/768; H01L23/522; (IPC1-7): H01L21/768; H01L21/3205
Domestic Patent References:
| JP59201443A | ||||
| JP59119853A | ||||
| JP61237446A | ||||
| JP60216555A | ||||
| JP60245227A | ||||
| JP712056B2 | ||||
| JP763064B2 | ||||
| JP514416B2 | ||||
| JP573052B2 | ||||
| JP81928B2 |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)