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Title:
THICKNESS SLIP PIEZOELECTRIC OSCILLATOR AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPS5847316
Kind Code:
A
Abstract:

PURPOSE: To obtain an oscillator having a reduced amount of leakage of vibrating energy with an easy way of production, by forming a driving electrode on the main surface opposite to a thickness slip piezoelectric oscillator with the center part of the main surface formed into a convex surface and the outer circumference part formed into a level difference surface, respectively and holding the oscillator at the outer circumference edge part of the level difference surface.

CONSTITUTION: Photoresists 2 and 2A are coated on the entire surfaces of main surfaces 1a and 1b of an AT-cut quartz bar 1 of a thickness slip piezoelectric element. Then the circumferences of the surfaces 1a and 1b are covered with a mask, and only the center part of each surface is exposed to light and developed to cake the photoresist. Thus resist films 3 and 4 are formed at the center parts of the main surfaces. Then the bar 1 is soaked into an etching solution, and the bare part containing no resist film is corroded to form level difference surfaces 5 and 6. Then the driving electrodes 7 and 8 plus the lead-out electrodes 7a and 8a extending to the outer circumference are formed by the vacuum vapor deposition after the exfoliation of films 3 and 4. These electrodes 7a and 8a on the surfaces 5 and 6 of the bar 1 are held with conduction by holding springs 10 and 11. The springs 10 and 11 are stuck to an airtight terminal 12. Thus a crystal oscillator 9 is obtained. The bar 1 is approximate to a biconvex type to reduce the leakage of energy for the oscillator 9.


Inventors:
IKENO HITOSHI
YANAGI HIROFUMI
KONNO TETSUO
Application Number:
JP14588481A
Publication Date:
March 19, 1983
Filing Date:
September 16, 1981
Export Citation:
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Assignee:
SEIKOSHA KK
International Classes:
H03H3/02; H03H9/05; H03H9/19; (IPC1-7): H03H3/02; H03H9/05
Attorney, Agent or Firm:
Kazuko Matsuda



 
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