Title:
ELECTRON-RAY DRAWING DEVICE
Document Type and Number:
Japanese Patent JPS598333
Kind Code:
A
Abstract:
PURPOSE:To adjust a focus easily, and to enable drawing at high speed by forming a cross wire used for measuring electron rays in the same plane as a reference mark for correcting a deflected strain of electron rays. CONSTITUTION:Electron rays with a sectional shape of a circle or a rectangle or the like are shrunk and deflected in predetermined size, and a fine pattern is formed onto the surface of a sample 12. The cross wire 19 used for measuring electron rays is formed in the same plane as the surface of the reference marks 20 for correcting the deflected strains at that time. Accordingly, the results of measurement of the size and dimming and the like of shaped electron rays adjusted on the wire 19 agree completely with the results of measurement on the marks 20, and accurate adjustment is enabled.
Inventors:
IWASAKI TERUO
YANAGISAWA AKIRA
KOMATA FUJIO
YANAGISAWA AKIRA
KOMATA FUJIO
Application Number:
JP11680182A
Publication Date:
January 17, 1984
Filing Date:
July 07, 1982
Export Citation:
Assignee:
HITACHI LTD
NIPPON TELEGRAPH & TELEPHONE
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01J37/305; H01J37/304; H01L21/027; (IPC1-7): H01J37/305
Domestic Patent References:
| JPS5541736A | 1980-03-24 | |||
| JPS54122978A | 1979-09-22 |
Attorney, Agent or Firm:
Katsuo Ogawa