Title:
【発明の名称】原子状又は分子状粒子のソースおよび該ソースを用いた測定装置
Document Type and Number:
Japanese Patent JPH03500829
Kind Code:
A
Abstract:
PCT No. PCT/GB88/00938 Sec. 371 Date Apr. 11, 1990 Sec. 102(e) Date Apr. 11, 1990 PCT Filed Oct. 28, 1988 PCT Pub. No. WO89/04586 PCT Pub. Date May 18, 1989.A source of atomic or molecular particles includes a source of ionized particles (1), an extraction electrode (2) and an einzel lens (3) to focus a beam of particles. A Wien filter (4) selects particles in said beam having a predetermined velocity and a charge exchange cell (7) neutralizes the ionized particles prior to the extraction of non-ionized particles from the beam.
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Inventors:
Sullivan, Jiyoung Lawrence
Sue Ning-Sheng
Sue Ning-Sheng
Application Number:
JP50907788A
Publication Date:
February 21, 1991
Filing Date:
October 28, 1988
Export Citation:
Assignee:
British Technology Group Limited
International Classes:
G21K1/00; G21K1/14; H01J37/08; H01J49/10; H01J49/48; H05H3/00; H05H3/02; (IPC1-7): G21K1/00; G21K1/14; H01J37/08; H01J49/10; H01J49/48; H05H3/00
Domestic Patent References:
| JPS57208029A | 1982-12-21 | |||
| JPS6186698A | 1986-05-02 | |||
| JPS5628499A | 1981-03-20 |
Foreign References:
| US4090077A | 1978-05-16 | |||
| US4261698A | 1981-04-14 |
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)
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