Title:
【発明の名称】回路パターンの画像検出方法およびその装置
Document Type and Number:
Japanese Patent JP2886278
Kind Code:
B2
Abstract:
PURPOSE:To detect the picture of a pattern to be inspected with high accuracy by allowing the picture element to be detected to have a region, in which the picture element and another adjacent picture element to be detected are overlapped mutually. CONSTITUTION:A picture detected by two one-dimensional image sensors 4a, 4b and A/D converters 9a, 9b and a mixer 10 respectively is obtained by synthesizing a picture A detected by the sensor 4a and a picture B detected by the sensor 4b, and both pictures are displaced crosswise only by half picture elements respectively. When the synthesized picture is represented by a picture C, the central positions of each picture element of the picture C form a right-angled triangle though the central positions of each picture element of the pictures A, B shape a square respectively. The offset and gain of the output amplifiers of the primary image sensors are compensated by look-up tables 10-1a, 10-1b in the mixer 10, and nonconformity due to the difference, etc., of the sensibility of the two one-dimensional image sensors is corrected, thus obtaining a light-and-shade picture signal having high accuracy. Accordingly, a hyperfine defect on a pattern to be inspected can be detected with high accuracy in a short time.
Inventors:
MAEDA SHUNJI
KUBOTA HITOSHI
MAKIHIRA HIROSHI
HIROI TAKASHI
KUBOTA HITOSHI
MAKIHIRA HIROSHI
HIROI TAKASHI
Application Number:
JP16407190A
Publication Date:
April 26, 1999
Filing Date:
June 25, 1990
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
G01N21/88; G01B11/24; G01B11/30; G01N21/94; G01N21/956; G06T1/00; G06T7/00; H01L21/3205; H01L21/66; H01L23/52; (IPC1-7): H01L21/66; G01B11/24; G01B11/30; G01N21/88; G06T1/00; G06T7/00
Domestic Patent References:
| JP61120572A | ||||
| JP63208964A |
Attorney, Agent or Firm:
Junnosuke Nakamura