Title:
【発明の名称】センサ装置の製造方法
Document Type and Number:
Japanese Patent JP3061680
Kind Code:
B2
More Like This:
Inventors:
Youzo Hirata
Application Number:
JP6417692A
Publication Date:
July 10, 2000
Filing Date:
March 19, 1992
Export Citation:
Assignee:
Tokico Co., Ltd.
International Classes:
G01F1/68; G01F1/692; G01P5/10; G01P5/12; (IPC1-7): G01P5/10; G01F1/68
Domestic Patent References:
| JP63271167A | ||||
| JP6435352A | ||||
| JP5264566A | ||||
| JP2107923A | ||||
| JP3502966A |
Attorney, Agent or Firm:
Masatake Shiga (2 outside)