Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PRODUCING DEVICE OF MAGNETIC THIN FILM
Document Type and Number:
Japanese Patent JPS6059536
Kind Code:
A
Abstract:

PURPOSE: To form a magnetic thin film with stable quality on a film by connecting a ferromagnetic material evaporating source part with a travelling part of the film through a slit having size regulated by the oblique evaporated surface and the evaporating surface of the evaporating source part.

CONSTITUTION: If electron beams 11 are irradiated on the surface of an evaporating material when the film 1 on which a magnetic thin film is to be formed travels along a rotary supporting body 3, the irradiated evaporating material is gasified and the gas flow is reached and adhered to the evaporated surface 9 of the film 1 through the slit 10. Since the slit 10 is formed with the length regulated by the length L of the evaporating surface of the ferromagnetic material and the evaporated surface 9 of the film 1 and the width regulated by the width of the film 1, the adhering reaction area of oxidative gas is restricted almost by the evaporated surface 9 of the film 1 and the quality of the magnetic thin film formed on the film 1 is stable within a comparatively short period.


Inventors:
TATSUNO TETSUO
ARIKAWA SETSU
Application Number:
JP16675483A
Publication Date:
April 05, 1985
Filing Date:
September 12, 1983
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TAIYO YUDEN KK
International Classes:
C23C14/00; C23C14/24; G11B5/85; H01F41/20; (IPC1-7): C23C14/24; G11B5/85; H01F41/20
Domestic Patent References:
JPS59141211A1984-08-13
JPS56143519A1981-11-09
Attorney, Agent or Firm:
Kinichi Kitamura