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Patent Searching and Data


Title:
STRAIN SENSOR
Document Type and Number:
Japanese Patent JPS5977303
Kind Code:
A
Abstract:

PURPOSE: To provide perfect protection for strain gage resistors and the like and to also provide perfect protection of a beam body, by forming a protecting layer around a thin film resistor circuit pattern by a dipping method.

CONSTITUTION: A beam body 1 comprises holes 5 and 6 and thin deformed parts 3 and 4. A corrosion preventing layer 9 comprising a polyimide resin film, a pattern forming surface 10, an insulating film 11, a resistor layer, and a conductor layer are sequentially laminated around the entire surrounding part of the beam body 1. The layers are selectively etched. Then, strain gage resistors R1WR4 are positioned on the deformed parts 3 and 4. A thin resistor circuit pattern 14 comprising the resistors R1WR4, a lead pattern L, and the like is formed. After the formation of the pattern 14, a protecting layer 15 is formed on the approximately entire surrounding part of the beam body 1 by a dipping method. Lead wires 17 are soldered to a terminal part, which is not coated by the layer 15.


Inventors:
SAKAMOTO KOUICHIROU
MIZUSHIMA SHINICHI
Application Number:
JP18708582A
Publication Date:
May 02, 1984
Filing Date:
October 25, 1982
Export Citation:
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Assignee:
TOKYO ELECTRIC CO LTD
International Classes:
G01L1/22; G01B7/16; (IPC1-7): G01B7/18; G01L1/22
Domestic Patent References:
JPS5797420A1982-06-17
Attorney, Agent or Firm:
Akira Kashiwagi