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Patent Searching and Data


Title:
SPUTTERING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JPS6043481
Kind Code:
A
Inventors:
SUZUKI KOUICHI
RONARUDO FUIRITSUPU HOUSON
Application Number:
JP15034883A
Publication Date:
March 08, 1985
Filing Date:
August 19, 1983
Export Citation:
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Assignee:
ASAHI GLASS CO LTD
RONARUDO FUIRITSUPU HOUSON
International Classes:
C23C14/34; C23C14/35; (IPC1-7): C23C14/34
Domestic Patent References:
JPS5435178A1979-03-15
Attorney, Agent or Firm:
Akira Uchida



 
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