To provide a tool for teaching installation and conveyance information more correctly and efficiently teaching a conveyance position, horizontality check and adjustment of a substrate conveyance robot and a holder in a processing chamber, and measurement of operating acceleration of the substrate conveyance robot where a substrate mounted on the robot begins to slide, and also to provide a method of teaching.

The tool for teaching installation and conveyance information of a target to be processed includes: an acceleration detector; a support plate for supporting the acceleration detector; a communication means for converting acceleration of gravity or acting acceleration applied to the acceleration detector into an electric signal to communicate; and a control means for processing the electric signal communicated from the communication means and displaying and outputting the obtained installation and conveyance information. The method employs the tool.