Title:
軟質材加工用工具
Document Type and Number:
Japanese Patent JP4277553
Kind Code:
B2
Inventors:
Yoshitaka Ataka
Hideo Oshima
Ryuichi Matsuki
Hideo Oshima
Ryuichi Matsuki
Application Number:
JP2003087591A
Publication Date:
June 10, 2009
Filing Date:
March 27, 2003
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
B24B53/12; H01L21/304
Domestic Patent References:
| JP10071559A | ||||
| JP10058306A | ||||
| JP10006218A | ||||
| JP2003053665A | ||||
| JP2001088010A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Hideyuki Sugiura
Yasuhiko Murayama
Noriko Yanai
Tadashi Takahashi
Masakazu Aoyama
Akihiko Eguchi
Hideyuki Sugiura
Yasuhiko Murayama
Noriko Yanai