Title:
TRANSVERSAL TYPE SURFACE ACOUSTIC WAVE DEVICE, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2015084535
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transversal type surface acoustic wave (SAW) device, for realizing satisfactory frequency temperature characteristics.SOLUTION: A SAW device 10A uses a crystal substrate 30 of an Euler angle (-1°≤φ≤1°, 117°≤θ≤142°, 42.79°≤|ψ|≤49.57°), and has a groove 32 which is formed by recessing a substrate located between an input IDT 12A and output IDT 12B which excite a SAW of a stop band upper end mode and an electrode finger 18 which constitutes the input IDT 12A and the output IDT 12B, and satisfies 0.01λ≤G in a case where wavelength of the SAW is set to λ, and depth of the groove 32 is set to G, and the depth G of the groove 32 and a line occupancy ratio η satisfy relation of -2.5×G/λ+0.675≤η≤-2.5×G/λ+0.775 in a case where the line occupancy ratio of the IDTs 12A and 12B is set to η.
Inventors:
YAMANAKA KUNIHITO
Application Number:
JP2014238239A
Publication Date:
April 30, 2015
Filing Date:
November 25, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/145; H03H9/25; H03H9/64
Attorney, Agent or Firm:
Yuichi Murakami
Takahiro Deguchi
Takahiro Deguchi
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