To provide a treatment apparatus capable of shortening the feed time of a member to be treated and capable of preventing the lowering of treatment quality.

The treatment apparatus is equipped with a total of eleven washing tanks A-K for washing a glass substrate and one drying tank for drying the glass substrate. In this treatment apparatus, the glass substrate is chucked only once before fed to the washing tanks and, after the glass substrate is taken out of the drying tank, the glass substrate is only once unchucked. That is, the chucking and unchucking of the glass substrate are not performed at each time when the glass substrate is fed between the washing tanks. Further, only the glass substrate is directly washed and dried.