移動テーブル装置

Title:

移動テーブル装置

Document Type and Number:

Japanese Patent JP2659978

Kind Code:

B2

Inventors:

KUDO AKIRA
TAKAHASHI YOSHIHIKO

Application Number:

JP962188A

Publication Date:

September 30, 1997

Filing Date:

January 21, 1988

Export Citation:

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Assignee:

TOSHIBA KK

International Classes:

G12B5/00; B23Q1/01; B23Q1/26; F16C29/10; H01L21/02; H01L21/027; H01L21/30; (IPC1-7): G12B5/00; B23Q1/26; F16C29/10; H01L21/02

Domestic Patent References:

JPS56137207A

Attorney, Agent or Firm:

外川英明（外１名）

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