Title:
高真空側に円環状の吸着面を備えたターボ分子ポンプ
Document Type and Number:
Japanese Patent JP2005520090
Kind Code:
A
Abstract:
The pump has a rotationally-symmetrical annular suction surface (A) on the high vacuum side, a compression chamber (B) with a rotor and stator having axially alternating rotor and stator sections (7,6) with corresponding blade surfaces, a pre-vacuum chamber (D) connected to a pre-pump system and a drive unit with rotor and stator components (9,10) and a bearing (11). A coaxial central opening provides a free center (F) closed by a closure plate (14) at the environment side, its high vacuum side actively or passively separated from the pre-vacuum chamber.
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Inventors:
Paul Mokler
Application Number:
JP2003574996A
Publication Date:
July 07, 2005
Filing Date:
February 26, 2003
Export Citation:
Assignee:
Gesellschaft fuer Schwerionenforschung mbH
International Classes:
F04D19/04; F04D25/16; F04D29/04; F04D29/056; F04D29/059; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel