Title:
TWO-BEAM INTERFEROMETER
Document Type and Number:
Japanese Patent JPH04204334
Kind Code:
A
Abstract:
PURPOSE:To obtain a signal with the frequency twice that of primary interference light to allow stable sampling even in the low-speed sliding of an interferometer by reflecting the primary interference light emitted from the interferometer on a plane mirror and returning the same to the interferometer again to obtain secondary interference light. CONSTITUTION:When a laser beam 60 is entered from a He-Ne laser 60 into an interferometer which consists of two corner cubes 4, 8 with the common mirror plane 6, emitted primary interference light is reflected on a plane mirror 66 arranged on a light passage, entered into the interferometer again and emitted as secondary interference light. To realize quadruture control function, a 1/8 wavelength plate 64 is arranged on the light passage ranging from a beam splitter 26 to the cube 4 so that the emitted primary or secondary interference light is split into a P wave and a S wave with a polarized beam splitter 68 on the emitted light passage and detected as secondary interference signals in A' and B' phases with approximately 90 deg. shift by PIN-ford diodes 70, 72. These siganls have the respective independent frequencies twice of a primary interference signal when used with a speed stabilizing carrier.
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Inventors:
YOSHIKAWA OSAMU
Application Number:
JP33954790A
Publication Date:
July 24, 1992
Filing Date:
November 30, 1990
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01B9/02; G01J3/45; (IPC1-7): G01B9/02; G01J3/45
Attorney, Agent or Firm:
Noguchi Shigeo