Title:
蒸着のための二次元開口部アレイ
Document Type and Number:
Japanese Patent JP5260312
Kind Code:
B2
Abstract:
A method for forming a layer on a surface in making a device, including providing a distribution member for receiving vaporized material, the distribution member having one or more walls defining a polygonal two-dimensional pattern of apertures is formed in a wall, which deliver vaporized material in a molecular flow onto the surface; providing the polygonal two-dimensional pattern of apertures to have at least four vertices, with a first set of apertures disposed at the vertices, a second set of edge apertures disposed between the apertures of the first set and defining the edges of the polygonal two-dimensional pattern, and a third set of interior apertures disposed within the periphery of the polygonal two-dimensional pattern defined by the first and second sets of apertures; and dimensioning the apertures to obtain a desired flow rate.
Inventors:
Grace, Jeremy Matthew
Long, michael
Long, michael
Application Number:
JP2008551285A
Publication Date:
August 14, 2013
Filing Date:
January 05, 2007
Export Citation:
Assignee:
Global OLED Technology Limited Liability Company
International Classes:
C23C14/24; H01L21/365; H01L51/50; H05B33/10
Domestic Patent References:
| JP6224138A | ||||
| JP2003129231A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Tomohiro Minamiyama
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Tomohiro Minamiyama