PURPOSE: To facilitate ultrafine processing of an atomic scale by scanning 16 probe while controlling a potential of a substrate and a tunnel current flowing between a tunnel probe and the substrate, and continuously forming a shape of protrusions or recesses on the substrate.

CONSTITUTION: Processing information input from an input unit 4 is sent to a voltage between a probe and a substrate, a tunnel current controller 8 and a probe driving mechanism driving voltage controller 9, which respectively generate a voltage pattern between the probe and the substrate and a probe driving pattern. In this case, a potential of an end of the probe is set to a dissolving potential. A voltage of the pattern between the probe and the substrate is applied while driving the probe according to the probe driving pattern. Thus, a precipitation reaction occurs as a reverse reaction on the substrate, silver is continuously precipitated on the substrate to form a fine wire. Thus, a hyperfine processing of an atomic scale is facilitated.