Title:
超音波洗浄方法及びその装置
Document Type and Number:
Japanese Patent JP5780890
Kind Code:
B2
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Inventors:
Hiroki Takahashi
Katsuhiro Ota
Maki Okawa
Akihiro Tahara
Egawa Katsuhisa
Katsuhiro Ota
Maki Okawa
Akihiro Tahara
Egawa Katsuhisa
Application Number:
JP2011189423A
Publication Date:
September 16, 2015
Filing Date:
August 31, 2011
Export Citation:
Assignee:
Kokusai Electric Semiconductor Service Co., Ltd.
International Classes:
H01L21/304; B08B3/12
Domestic Patent References:
| JP2011077135A | ||||
| JP2008227300A | ||||
| JP3218016A | ||||
| JP2003031540A | ||||
| JP2007165695A | ||||
| JP2007019135A | ||||
| JP61101283A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation