To provide an ultrasonic vibration device for use in ultrasonic machining which simultaneously excites fundamental resonance frequency and higher order resonance frequency.

The ultrasonic vibration device (1, 2) which simultaneously excites fundamental resonance frequency and higher order resonance frequency, is driven, while vibration phases of a plurality of frequencies are being controlled, whereby not only waveforms of vibration of fundamental resonance frequency but also waveforms of vibration having ultrasonic vibration components of frequency of higher order can be generated on a vibration tool part (3, 4), and hence machining efficiencies of various machining objects having frequency characteristics can be improved.