To provide an ultrasonic sonde with a simple structure in which a piezoelectric element capable of covering up to a high-frequency band is mounted on a small-diameter rod capable of enhancing a spatial resolution to enable the measurement of an ultrasonic sound field.
In the ultrasonic sonde constituted of an acoustic waveguide composed of an electroconductive rod whose one end is formed on a sound receiving face and which is also used as a ground side electrode, a piezoelectric element film arranged surrounding the electroconductive rod in the vicinity of the end portion opposite to the sound receiving face, and a signal side electrode coming into contact with the surface of the piezoelectric element film arranged insulated from the electroconductive rod, the piezoelectric element is formed by bringing a part consisting of a titanium material to a strong alkaline solution including a piezoelectric element forming component to carry out hydrothermal reaction under a high temperature and a high pressure.
COPYRIGHT: (C)2005,JPO&NCIPI
JP4632800 | Ultrasonic probe |
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Yumiko Sugimoto
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