Title:
ULTRAVIOLET IRRADIATION APPARATUS
Document Type and Number:
Japanese Patent JP2021053565
Kind Code:
A
Abstract:
To improve irradiation efficiency.SOLUTION: An ultraviolet irradiation apparatus of an embodiment comprises includes a plurality of substrates and a cooling block. In the substrate, a plurality of light emitting elements are arrayed on a front face. The cooling block is arranged on a rear face of the substrate, and has a flow channel through which fluid circulates inside thereof. The plurality of substrates are each arranged such that an angle θ1[°] formed by a surface to be irradiated of a body to be irradiated and a width direction of the substrate crossing an array direction of the plurality of light emitting elements is 60[°] or less, and a distance between the body to be irradiated and the plurality of light emitting elements becomes approximately equal.SELECTED DRAWING: Figure 1
Inventors:
TANAKA TAKAAKI
NAKAGAWA YUKINOBU
NAKAGAWA YUKINOBU
Application Number:
JP2019177983A
Publication Date:
April 08, 2021
Filing Date:
September 27, 2019
Export Citation:
Assignee:
TOSHIBA LIGHTING & TECHNOLOGY
International Classes:
B01J19/12; B29C35/08; H01L33/64
Domestic Patent References:
| JP2016025165A | 2016-02-08 | |||
| JPH07195018A | 1995-08-01 |
Attorney, Agent or Firm:
Sakai International Patent Office