Title:
磁気レオロジー仕上げにより形成された均一な薄膜
Document Type and Number:
Japanese Patent JP2005535133
Kind Code:
A
Abstract:
An improved method for producing a thin layer having highly uniform thickness, which layer may be pre-coated on an undulating surface of a substrate element. A working layer of the material is formed having a thickness greater than the final thickness desired. An areal (XY) determination of working layer thickness is made by ellipsometry, laser interferometry, or x-ray diffraction, or other known means. A map of thicknesses to be removed from the free surface of the working layer is entered into the control system of a magnetorheological finishing apparatus. The working layer is mounted on a workpiece holder of the apparatus and correctly indexed to the machine. The machine then removes material by magnetorheological finishing as instructed by the control system to leave a residual layer having a very high degree of thickness uniformity at a nominal average thickness and a very high surface integrity.
Inventors:
Triccard, mark
Cordonski, William
Cordonski, William
Application Number:
JP2004526402A
Publication Date:
November 17, 2005
Filing Date:
August 04, 2003
Export Citation:
Assignee:
QDD Technologies Incorporated
International Classes:
B24B1/00; B24B7/22; B24B31/112; C03C17/23; H01L21/304; (IPC1-7): H01L21/304; B24B31/112; B24B37/00; C03C17/23
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeru Sakuma
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeru Sakuma