Title:
減圧乾燥装置および減圧乾燥方法
Document Type and Number:
Japanese Patent JP4252343
Kind Code:
B2
Inventors:
Koichi Ueno
Hiroyuki Kitazawa
Hiroyuki Kitazawa
Application Number:
JP2003085475A
Publication Date:
April 08, 2009
Filing Date:
March 26, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
F26B5/04; H01L21/304; F26B11/12; H01L21/027
Domestic Patent References:
| JP2000031005A | ||||
| JP9320949A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita