Title:
VACUUM EXHAUSTING APPARATUS
Document Type and Number:
Japanese Patent JPS5990784
Kind Code:
A
Abstract:
PURPOSE: To prevent moisture contained in the introduced atmospheric air from condensing on the outer wall surface of a liquefied gas tank, by providing a means for heating the outer wall of said tank to the room temperature in an apparatus in which a cold trap having therein a liquefied gas tank is attached to an intake system of a molecular turbo-pump.
CONSTITUTION: In effecting leakage test of an article A to be treated that is placed in a helium gas chamber D by using a vacuum exhausting apparatus in a leakage detector, a high vacuum is produced at first by operating a molecular turbo-pump 7, and then the temperature in a cold trap 1 is kept low.
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Inventors:
NARITA KIYOSHI
ARITA KIMIHARU
ARITA KIMIHARU
Application Number:
JP19960082A
Publication Date:
May 25, 1984
Filing Date:
November 12, 1982
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
F04B37/16; F04B37/14; F04D19/04; (IPC1-7): F04B37/16; F04D19/04
Domestic Patent References:
JP45034911A | ||||
JP44022582A |
Attorney, Agent or Firm:
Inukai Shinpei
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