To provide a probing device and method for testing the electric characteristics of an object to be tested under a vacuum.
A probing device 100 for testing an object W in a vacuum state is provided. This probing device comprises a main body 1, a support 2 disposed in a prober chamber of the main body, a main chuck 6 disposed in the prober chamber of the main body to be mounted to the support through at least one mounting mechanism 3, a moving mechanism 16 disposed in the prober chamber of the main body to move the support to which the main chuck is mounted, to X, Y, Z and θ directions, a head plate 12 disposed above the main body, a cylinder 10 mounted to the head plate to form an airtight space 28 internally, a hermetically sealing mechanism 8 for forming the airtight space provided in a lower end 10a of the cylinder, a probe card 14 disposed opposing the main chuck in the airtight space, and an exhaust mechanism 15 for exhausting the inside of the airtight space.
COPYRIGHT: (C)2004,JPO
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Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura