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Patent Searching and Data


Title:
VACUUM PUMP CONTROLLER
Document Type and Number:
Japanese Patent JP2003097428
Kind Code:
A
Abstract:

To provide a vacuum pump controller capable of reducing the electric power consumption of a vacuum pump and preventing a harmful influence accompanied with the stop of the pump.

In this vacuum pump controller driving a motor 5 by a controller 3 to exhaust air in a chamber by driving the motor 5 and putting a space 21 inside the chamber into a vacuum condition, whether the chamber 2 is in vacuum control or not is detected by a valve 7 provided in a part of a pipe 6 or either of pressure sensors 9, 10 provided in the front and rear of the valve 7. When the space 21 inside the chamber is in non-vacuum control, the number of revolutions of the motor 5 driving the vacuum pump 4 is put in a low idling condition when compared with the number of revolutions in vacuum control by the controller 3.


Inventors:
YOSHIMUNE KAZUO
NAITO YOSHIHIRO
Application Number:
JP2001295148A
Publication Date:
April 03, 2003
Filing Date:
September 26, 2001
Export Citation:
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Assignee:
AISIN SEIKI
International Classes:
F04B49/06; F04B37/16; (IPC1-7): F04B37/16; F04B49/06