Title:
VACUUM PUMP AND CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2023078905
Kind Code:
A
Abstract:
To propose a vacuum pump capable of grasping noise resistance or the like of a master circuit and a slave circuit for controlling operation of each of sections contained in the vacuum pump, and a control device used in such the vacuum pump.SOLUTION: The present invention includes control means 200 for controlling operation of each section contained in a vacuum pump 100. The control means 200 includes slave circuits 201 and 202 connected with each section and control operation of each section, and a master circuit 204 which is connected with the slave circuits 201 and 202 and controls the slave circuits 201 and 202. The master circuit 204 periodically performs communication with the slave circuits 201 and 202 and acquires history of communication state of in the communication.SELECTED DRAWING: Figure 6
Inventors:
HOMMA RYUTARO
KASAHARA KAZUYA
FUKAMI HIDEO
KASAHARA KAZUYA
FUKAMI HIDEO
Application Number:
JP2021192231A
Publication Date:
June 07, 2023
Filing Date:
November 26, 2021
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04D19/04; F04D27/00
Domestic Patent References:
| JP2021055586A | 2021-04-08 | |||
| JP2019022106A | 2019-02-07 |
Foreign References:
| US6961363B1 | 2005-11-01 |
Attorney, Agent or Firm:
Yoshihiro Uemura
Hiroko Negishi
Hiroko Negishi
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