PURPOSE: To uniformize the thickness of a film on a substrate by irradiating the surface of a sample to be irradiated with linearly converged laser light.
CONSTITUTION: The laser light 1 transmitted from a laser oscillator is uniaxially converged by a cylindrical lens 100, and the sample 7 to be irradiated which is arranged in a vacuum vessel 5 is irradiated with converged light through a transmitting window 4. Accordingly, since the lens 100 is used for irradiation, the irradiating light is converged into a linear beam 101 on the sample 7. Meanwhile, as the surface of the sample 7 is irradiated with the linear beam 101, vaporized particles are generated along the linear beam 101, emitted in the direction normal to the part to be irradiated and deposited on a substrate 8 opposed to the sample 7 to form a uniform thin film.
ZUMOTO NOBUYUKI
UCHIYAMA TOSHIE
NAI YASUTO
TANAKA MASAAKI
