OLEDのための温度感受性材料の気化

Japanese Patent JP5037949

B2

A device vaporizes organic materials onto a substrate surface to form a film. The device includes a vaporization apparatus to receive a quantity of organic material that can have one or more components each having a different vaporization temperature, the vaporization apparatus having a first region and a second region spaced from the first region; a cooling unit to actively cool the organic material in the first region so that each of the one or more organic components is maintained well below its vaporization temperature to reduce degradation of the organic material; heating unit to heat the second region of the vaporization apparatus above the vaporization temperature of each of the one or more organic components; and a metering unit having a permeable member to meter organic material at a controlled rate from the first region into the second region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.

JPWO2010038384	A film forming apparatus and a film forming method and a film manufacturing method using the film forming apparatus.
JPH07321068	METAL WIRING FORMATION AND SPUTTERING DEVICE THAT IS USED THEREFOR
JPS59222572	HEATING METHOD OF BASE PLATE FOR VAPOR DEPOSITION

Long, michael
Randolph Karl
Grace, Jeremy Matthew
Freeman, Dennis Ray
Neil Peter Redden
Coppe, bruce edward

JP2006554149A

October 03, 2012

February 11, 2005

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Global OLED Technology Limited Liability Company

C23C14/54; C23C14/00; C23C14/12; C23C14/24; C23C16/00; H01J1/62; H01L51/50; H05B33/10; H01L51/00; H01L51/30

JP49045989B1
JP2002348659A
JP2003317957A
JP2002522637A

Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Tomohiro Minamiyama

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