Title:
UV TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3176349
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a UV treatment apparatus capable of removing contamination on a substrate without causing deposits in a chamber.
SOLUTION: A substrate 4 is carried in a chamber by a conveying roller 5. There are provided a UV generating lamp 6 and a dry air supply pipe 11 inside a glass pipe 7. Dry air is supplied into the glass pipe 7 by the dry air supply pipe 11. The UV generating lamp 6 irradiates the dry air in the glass pipe 7 with UV light to generate ozone. This ozone is discharged towards the substrate 4 from an ozone discharge port 9. Further, UV light with low energy that does not contribute to the ozone generation reaction is transmitted through the glass pipe 7. The ozone and the UV light from the glass pipe 7 decompose and remove the contamination on the substrate 4.
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Inventors:
Masami Yamashita
Application Number:
JP846899A
Publication Date:
June 18, 2001
Filing Date:
January 14, 1999
Export Citation:
Assignee:
Kagoshima NEC Corporation
International Classes:
H01L21/302; H01L21/304; H01L21/3065; (IPC1-7): H01L21/304
Domestic Patent References:
| JP612766B2 | ||||
| JP49373B2 |
Other References:
【文献】特許2524869(JP,B2)
Attorney, Agent or Firm:
Nobuo Takahashi (3 outside)