Title:
Vertical thermal treatment equipment
Document Type and Number:
Japanese Patent JP5958231
Kind Code:
B2
Inventors:
Wamura Yu
Hiromi Shima
Hiromi Shima
Application Number:
JP2012209591A
Publication Date:
July 27, 2016
Filing Date:
September 24, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; H01L21/316
Domestic Patent References:
| JP2003017422A | ||||
| JP2008078448A | ||||
| JP2010226092A | ||||
| JP5211122A | ||||
| JP6349761A |
Foreign References:
| US20010052556 |
Attorney, Agent or Firm:
Toshio Inoue