Title:
振動バレル研磨方法及び振動バレル研磨システム
Document Type and Number:
Japanese Patent JP6984592
Kind Code:
B2
Abstract:
In one embodiment, a vibration barrel polishing method using a vibration barrel polishing system that includes a polishing tank having a bottom surface therein and a polishing jig capable of holding a workpiece and rotatable around a rotation axis is provided. This method includes a step of supporting the polishing jig in the polishing tank in a state in which a lowermost portion of the polishing jig is separated from the bottom surface, a clearance d between the lowermost portion of the polishing jig and the bottom surface being greater than or equal to a grain diameter of a polishing medium, a step of causing the polishing medium to flow in the polishing tank, and a step of rotating the polishing jig around the rotation axis in the state in which the lowermost portion of the polishing jig is separated from the bottom surface.
Inventors:
Shigeru Tanahashi
Naoyuki Ogiwara
Naoyuki Ogiwara
Application Number:
JP2018509262A
Publication Date:
December 22, 2021
Filing Date:
March 24, 2017
Export Citation:
Assignee:
Shinto Industry Co., Ltd.
International Classes:
B24B31/06; B24B31/12
Domestic Patent References:
| JP9070748A | ||||
| JP58040262A | ||||
| JP2015027709A | ||||
| JP4269161A | ||||
| JP9234662A | ||||
| JP2011115904A |
Foreign References:
| US3464163 | ||||
| DE2344639A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Omori Tetsuhei
Daisuke Okumura
Yoshiki Kuroki
Omori Tetsuhei
Daisuke Okumura
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