Title:
VIBRATION ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, MOBILE UNIT, AND METHOD OF MANUFACTURING VIBRATION ELEMENT
Document Type and Number:
Japanese Patent JP2014127726
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a small and low vibration element that dispenses with a package, and a method of manufacturing the same.SOLUTION: A vibration element 1 is formed with a protection part 20 that has a cavity part 22 provided on front and back sides or an outer edge of a principal plane of a vibration part 12 provided in a base plate 10. In addition, a plurality of openings 24 needed to melt and remove a sacrificial layer in the formation of the cavity part 22 are formed in the protection part 20. Furthermore, a sealing layer 40 for closing the opening 24 is formed to airtightly seal the vibration part 12 surrounded with the cavity part 22.
Inventors:
MAEDA SUSUMU
TANAKA MASAKO
TANAKA MASAKO
Application Number:
JP2012280698A
Publication Date:
July 07, 2014
Filing Date:
December 25, 2012
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/02; H03B5/32
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe