Title:
VIBRATION ELEMENT, GYRO SENSOR ELEMENT, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOVING BODY
Document Type and Number:
Japanese Patent JP2015179933
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a compact and low-impedance vibration element with high production efficiency.SOLUTION: A vibration element 1 includes: a base part 10; and drive arms 20, 30 extending from the base part 10 and including through holes 28, 38. The drive arm 20, 30 alternately include: a plurality of broad parts 22, 32 vibrating along an in-plane direction and having broad widths in the in-plane direction, and a plurality of narrow parts 26, 36 having narrow widths in the in-plane direction. The through holes 28, 38 are disposed at positions overlapped with the broad parts 22, 32.
Inventors:
ICHIKAWA FUMIO
Application Number:
JP2014056091A
Publication Date:
October 08, 2015
Filing Date:
March 19, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/19; G01C19/5607; H01L41/113; H01L41/311; H01L41/313; H01L41/332; H03H9/215
Domestic Patent References:
| JP2012029023A | 2012-02-09 | |||
| JP2003060482A | 2003-02-28 | |||
| JP2008209388A | 2008-09-11 | |||
| JP2008113098A | 2008-05-15 | |||
| JP2006208261A | 2006-08-10 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe
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