振動素子、振動素子の製造方法、物理量センサー、慣性計測装置、電子機器および移動体

Title:

振動素子、振動素子の製造方法、物理量センサー、慣性計測装置、電子機器および移動体

Document Type and Number:

Japanese Patent JP7139610

Kind Code:

B2

Abstract:

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

More Like This:

JP2017009404	INERTIAL FORCE SENSOR
JP2012198224	DUAL-AXIS YAW RATE SENSING UNIT HAVING TUNING FORK GYROSCOPE ARRANGEMENT
JP3771100	ELECTROSTATIC CAPACITY DETECTION TYPE SENSOR, GYROSCOPE, AND INPUT DEVICE

Inventors:

Seiichiro Ogura
Keiichi Yamaguchi
Masahiro Oshio
Takashi Yamazaki

Application Number:

JP2018009173A

Publication Date:

September 21, 2022

Filing Date:

January 23, 2018

Export Citation:

Click for automatic bibliography generation Help

Assignee:

Seiko Epson Corporation

International Classes:

G01C19/5621; G01C19/5628

Domestic Patent References:

JP2013126104A
JP2015090275A
JP2017142249A
JP2016186479A
JP2017083286A

Attorney, Agent or Firm:

Tatsuya Masuda
Kazuo Asahi

Previous Patent: Information processing device and information processing program

Next Patent: SWIRL DECELERATION MACHINE